Gas-Flow Sensor Based on Self-Oscillating and Self-Sensing Cantilever
نویسندگان
چکیده
منابع مشابه
Modeling of a Self-Oscillating Cantilever
A radioisotope-powered, self-oscillating cantilever beam has been developed for small scale applications. A thin beam is placed within a short distance from a radioisotope source and as the charged particles from the source are collected on the beam, it is attracted towards the source. As it contacts the source, the beam is discharged and returns to it's initial position. The period of oscillat...
متن کاملPeizoresistive Mems Cantilever based Co2 Gas Sensor
A study about the piezoresistive Micro-Electro-Mechanical Systems (MEMS) cantilever for a chemical sensitive mass based sensor has been carried out to enhance sensor sensitivity. The sensitive region attracts the CO2 molecules there by introducing the stress concentration region (SCR). Three types of SCR geometry designs were first analysed using Intellisuite software to study the effect of str...
متن کاملPeizoresistive MEMS Cantilever based CO2 Gas Sensor
A study about the piezoresistive Micro-Electro-Mechanical Systems (MEMS) cantilever for a chemical sensitive mass based sensor has been carried out to enhance sensor sensitivity. The sensitive region attracts the CO2 molecules there by introducing the stress concentration region (SCR). Three types of SCR geometry designs were first analysed using Intellisuite software to study the effect of str...
متن کاملA MEMS-based Benzene Gas Sensor with a Self-heating WO3 Sensing Layer
In the study, a MEMS-based benzene gas sensor is presented, consisting of a quartz substrate, a thin-film WO(3) sensing layer, an integrated Pt micro-heater, and Pt interdigitated electrodes (IDEs). When benzene is present in the atmosphere, oxidation occurs on the heated WO(3) sensing layer. This causes a change in the electrical conductivity of the WO(3) film, and hence changes the resistance...
متن کاملCantilever enhanced gas sensing using photoacoustic spectroscopy
ii Abstract (in Finnish) iiiin Finnish) iii
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Proceedings
سال: 2018
ISSN: 2504-3900
DOI: 10.3390/proceedings2130846